Project Reference
Semiconductor Cleanroom EOT Crane Explosion-proof
Project Overview:
With rapid advancement of high-precision sophisticated manufacturing in China, the lifting equipment industry keeps evolving alongside special high-tech sectors. Integrating heavy-duty load capacity with ultra-precise automatic intelligent manufacturing, China’s first fully automatic cleanroom explosion-proof overhead crane was officially delivered, laying a solid intelligent & eco-friendly foundation for semiconductor, pharmaceutical, precision machinery and other high-end industries.
This tailor-made crane was delivered to a Jiangsu-based enterprise specializing in semiconductor-grade polysilicon production. The client’s workshop imposes two strict core requirements:
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Ultra-clean production environment: Cleanliness Class ISO 4 (GB Class 7), limited to ≤10,000 particles of 0.1μm per cubic meter;
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Hazardous gas protection: The workshop contains flammable & explosive gases, with the crane certified to explosion-proof grade dIICT4.
The crane realizes fully automatic material transfer between reduction furnaces, cleaning stations, transfer platforms and rod disassembly stations following preset travel routes, with ultra-precise positioning performance.
To meet strict process standards, the whole machine adopts wear-resistant & corrosion-resistant materials equipped with integrated dust collection systems, which drastically reduces particulate pollution generated by mechanical friction during operation and fills the domestic technical gap of special lifting equipment for semiconductor workshops.
Henan Mine has obtained 16 invention patents through independent R&D of this model, ranking among the few domestic manufacturers qualified for producing cleanroom explosion-proof automatic cranes.
Core Advanced Technologies:
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High-sealed explosion-proof driving unit & maintenance-free self-lubricating bearings
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Compact integrated design combining explosion-proof motor, reducer, brake and electrical monitoring system
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Main girder fabricated from high-strength alloy steel; all rotating, protective and connecting components made of stainless steel
Core Product Advantages:
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Clean & Dust-Free Performance
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Adopts high-voltage anti-static spraying and fully sealed structural welding to avoid dust adhesion and particle generation
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Equipped with permanent magnet dust removal modules, explosion-proof electric dust collectors and mechanical oil collecting trays to automatically collect iron filings, dust and lubricant leakage
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Low-noise operation to protect ultra-clean workshop environment
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Full-Range Explosion-Proof Safety
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Every movement mechanism of the crane features full explosion-proof protection, eliminating ignition risks in flammable gas environments and ensuring stable, reliable operation under hazardous working conditions.
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Intelligent Unmanned Operation
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Fully automatic unattended running, anti-sway function, auto hooking & unhooking
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Laser barcode positioning system, positioning accuracy reaching sub-millimeter level for all stations
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Built-in intelligent diagnosis system: automatic fault alarm, root cause detection and component service life reminder
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Corporate R&D Direction:
- While expanding production capacity of standard single-girder & double-girder overhead cranes, Henan Mine accelerates R&D on container cranes, large-tonnage & long-span cranes, intelligent remote monitoring cranes, all-terrain cranes and energy-saving eco-friendly lifting equipment. The company commits to transforming product development from traditional general lifting machinery to special intelligent high-end equipment, focusing on specialization, lightweight design, intelligence and high-end performance.